Theory and modelling of epitaxy

Dr. Roberto Bergamaschini

English

The course provides a general introduction to the physics of epitaxial growth, offering an overview of the key thermodynamic and kinetic factors driving the formation of thin-films rather than three-dimensional micro- or nano- structures during material deposition.
The topics will include:

  1. General concepts of epitaxy and experiments
  2. Growth methods
  • physics of crystal growth
  • review of key experimental growth methods: LPE, MBE, CVD, ALD
  • characterization techniques: STM/AFM, LEED, RHEED
  1. Surface energy and crystal shape
  2. Continuum models of morphological evolution
  • Mullins model: thermal smoothing
  • kinetic effects and Kinetic Wulff shape - The Asaro-Tiller-Grinfeld instability and beyond
  1. Nucleation theory and island growth
  2. Atomistic growth mechanisms
  • Solid-on-solid model and concept of KMC
  • step kinetics model
    • Erlich-Schwoebel barrier and step bunchings
  1. Plastic relaxation in epitaxy
  • dislocations, types and properties - dislocations in films and critical thickness
  • dislocated islands
  1. Self assembly and nanostructures: QD, QW, NW
  • ordering and substrate patterning
  • top-down approach: selective area growth
  • droplet epitaxy
  • the vapour-liquid-solid (VLS) growth mode and Nanowires
  • core-shell structures

2 CFU / 16 hours

ISTRUZIONE DI QUALITÁ

Theory and modelling of epitaxy

Dr. Roberto Bergamaschini

English

The course provides a general introduction to the physics of epitaxial growth, offering an overview of the key thermodynamic and kinetic factors driving the formation of thin-films rather than three-dimensional micro- or nano- structures during material deposition.
The topics will include:

  1. General concepts of epitaxy and experiments
  2. Growth methods
  • physics of crystal growth
  • review of key experimental growth methods: LPE, MBE, CVD, ALD
  • characterization techniques: STM/AFM, LEED, RHEED
  1. Surface energy and crystal shape
  2. Continuum models of morphological evolution
  • Mullins model: thermal smoothing
  • kinetic effects and Kinetic Wulff shape - The Asaro-Tiller-Grinfeld instability and beyond
  1. Nucleation theory and island growth
  2. Atomistic growth mechanisms
  • Solid-on-solid model and concept of KMC
  • step kinetics model
  • Erlich-Schwoebel barrier and step bunchings
  1. Plastic relaxation in epitaxy
  • dislocations, types and properties - dislocations in films and critical thickness
  • dislocated islands
  1. Self assembly and nanostructures: QD, QW, NW
  • ordering and substrate patterning
  • top-down approach: selective area growth
  • droplet epitaxy
  • the vapour-liquid-solid (VLS) growth mode and Nanowires
  • core-shell structures

2 CFU / 16 hours

Staff

    Manager

  • Francesco Cimbro Mattia Montalenti
  • Teacher

  • Roberto Bergamaschini
    Roberto Bergamaschini

Enrolment methods

Manual enrolments