Course Syllabus
Titolo
Theory and modelling of epitaxy
Docente(i)
Dr. Roberto Bergamaschini
Lingua
English
Breve descrizione
The course provides a general introduction to the physics of epitaxial growth, offering an overview of the key thermodynamic and kinetic factors driving the formation of thin-films rather than three-dimensional micro- or nano- structures during material deposition.
The topics will include:
- General concepts of epitaxy and experiments
- Growth methods
- physics of crystal growth
- review of key experimental growth methods: LPE, MBE, CVD, ALD
- characterization techniques: STM/AFM, LEED, RHEED
- Surface energy and crystal shape
- Continuum models of morphological evolution
- Mullins model: thermal smoothing
- kinetic effects and Kinetic Wulff shape - The Asaro-Tiller-Grinfeld instability and beyond
- Nucleation theory and island growth
- Atomistic growth mechanisms
- Solid-on-solid model and concept of KMC
- step kinetics model
-
- Erlich-Schwoebel barrier and step bunchings
- Plastic relaxation in epitaxy
- dislocations, types and properties - dislocations in films and critical thickness
- dislocated islands
- Self assembly and nanostructures: QD, QW, NW
- ordering and substrate patterning
- top-down approach: selective area growth
- droplet epitaxy
- the vapour-liquid-solid (VLS) growth mode and Nanowires
- core-shell structures
CFU / Ore
2 CFU / 16 hours
Periodo di erogazione
Febbraio
Sustainable Development Goals
Title
Theory and modelling of epitaxy
Teacher(s)
Dr. Roberto Bergamaschini
Language
English
Short description
The course provides a general introduction to the physics of epitaxial growth, offering an overview of the key thermodynamic and kinetic factors driving the formation of thin-films rather than three-dimensional micro- or nano- structures during material deposition.
The topics will include:
- General concepts of epitaxy and experiments
- Growth methods
- physics of crystal growth
- review of key experimental growth methods: LPE, MBE, CVD, ALD
- characterization techniques: STM/AFM, LEED, RHEED
- Surface energy and crystal shape
- Continuum models of morphological evolution
- Mullins model: thermal smoothing
- kinetic effects and Kinetic Wulff shape - The Asaro-Tiller-Grinfeld instability and beyond
- Nucleation theory and island growth
- Atomistic growth mechanisms
- Solid-on-solid model and concept of KMC
- step kinetics model
- Erlich-Schwoebel barrier and step bunchings
- Plastic relaxation in epitaxy
- dislocations, types and properties - dislocations in films and critical thickness
- dislocated islands
- Self assembly and nanostructures: QD, QW, NW
- ordering and substrate patterning
- top-down approach: selective area growth
- droplet epitaxy
- the vapour-liquid-solid (VLS) growth mode and Nanowires
- core-shell structures
CFU / Hours
2 CFU / 16 hours
Teaching period
February